CHEMICAL-PHYSICAL METHODOLOGIES FOR NANOTECHNOLOGIES
Academic Year 2023/2024 - Teacher: VALENTINA SPAMPINATOExpected Learning Outcomes
The course is meant to provide advanced knowledge about methodologies for the preparation and the characterisation of micro- and nano-structured surfaces and materials.
In particular, with regards to:
- knowledge and understanding, the objective is to learn the principles and foundations that underlie the preparation methodologies and characterization techniques of surfaces and micro- and nano-structured materials;
- the ability to apply knowledge and understanding, the objective is to apply what has been learned in class in the design of experiments aimed at the preparation and characterization of micro- and nano-structured systems;
- autonomy of judgement, the objective is to correctly interpret experimental scientific data;
- the ability to communicate, the objective is to communicate the concepts learned in class, and more generally scientific topics, with language properties, rigor and accuracy;
- the ability to continue the study independently, the objective is to enable students to apply the knowledge learned during the lectures to all those situations that require the set up of experiments, from the preparation of samples to their characterization, in critical and correct manner.
Course Structure
Required Prerequisites
Attendance of Lessons
Detailed Course Content
I - An outline of transport processes.
Mass transport and diffusion laws.
II - Methods for obtaining micro- and nano- structured systems.
Patterning methods. Top-down and bottom-up approaches. Lithographic methods: optical lithography, e-beam and ion-beam lithography. Soft lithography. Non-lithographic patterning methods.
III - Techniques for spatially resolved chemical characterization of thin films and surfaces.
Ion beam-based method. RBS, MEIS, LEIS. Secondary ion Mass spectrometry and related techniques. Methods based on interaction with plasmas. General concepts. GD-MS and GD-OES. Electron spectroscopy. Outline of atomic force microscopy.
IV - Advanced data treatment methods.
Textbook Information
Course Planning
Subjects | Text References | |
---|---|---|
1 | Outline of transport processes. | see section "Testi di riferimento" |
2 | Methods for obtaining micro- and nano- structured systems. | see section "Testi di riferimento" |
3 | Techniques for spatially resolved chemical characterization of thin films and surfaces. | see section "Testi di riferimento" |
Learning Assessment
Learning Assessment Procedures
Examples of frequently asked questions and / or exercises
- Basic principles of "Static SIMS"
- Examples of plasmas' applications
- Factors that can influence the resolution in a lithographic process