METODOLOGIE CHIMICO-FISICHE PER LE NANOTECNOLOGIE
Academic Year 2021/2022 - 1° Year - Curriculum Chimica dei Materiali e NanotecnologieCredit Value: 6
Scientific field: CHIM/02 - Physical chemistry
Taught classes: 28 hours
Exercise: 24 hours
Term / Semester: 2°
Learning Objectives
The course is aimed to provide advanced knowledge on methodologies for the preparation and characterization of micro- and nano- structured surfaces and materials.
Course Structure
The course is structured in classes (5 credits) and class exercises (1 credit).
Should teaching be carried out in mixed mode or remotely (due to the Covid-19 emergency), it may be necessary to introduce changes with respect to previous statements, in line with the programme planned and outlined in the syllabus.
Learning assessment.
Oral exam. The student will discuss a scientific paper of his choice (possibly pre-agreed with the teacher) on a topic relevant to the course but not overlapping with the those covered in classes. The interview will continue with questions on course contents. Learning assessment may also be carried out on line, should the conditions require it.
Detailed Course Content
I - Phase transport and separation processes in materials.
Mass transport and diffusion laws; solution of the diffusion equation for some simple systems. Phase separation processes. Spinodal decomposition, nucleation and growth.
II - Methods for obtaining micro- and nano- structured systems.
Patterning methods. Top-down and bottom-up approaches. Lithographic methods: optical lithography, e-beam and ion-beam lithography. Soft lithography. Non-lithographic patterning methods.
III - Techniques for spatially resolved chemical characterization of thin films and surfaces.
Ion beam-based method. General concepts. RBS, MEIS, LEIS. Secondary ion Mass spectrometry and related techniques. Methods based on interaction with plasmas. General concepts. GD-MS and GD-OES. Electron spectroscopy. Near field blends. Atom probe tomography.
Textbook Information
Students are encouraged to perform autonomous bibliographic search. Guidelines and indications on texts, different for each of the topics coveredin the course, will be provided by the teacher. Furthermore, the electronic copy of the lecture slides and, on some topics, additional material in electronic format, will be made available.